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Brochure title:
EMSL Instrument Series: Deposition and Microfabrication: Sputter Deposition System
Description:
Only available at EMSL, the DiscoveryŽ Deposition System has been customized to be a fully automated multi-functional “hybrid” instrument with several modes for thin film processing, including multi-target sputtering, effusion cell deposition, electron beam deposition, and in-situ reflection high-energy electron diffraction (RHEED) materials characterization.
Clearance number:
PNNL-SA-75580
Contact/Custodian Employee ID:
West, Staci A (staci.west@pnnl.gov)
Date published:
October 2010
Number of pages:
2
Background information:
Category:
EMSL (William R. Wiley Environmental Molecular Sciences Laboratory)
Key words:
“hybrid” instrument, EMSL, DiscoveryŽ Deposition System, instrument, discovery

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