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Brochure title:
EMSL Capability Series Deposition and Microfabrication
Description:
Designed to augment research important to a variety of disciplines, EMSL’s Deposition and Microfabrication Capability tackles serious scientific challenges from a microscopic perspective. From deposition instruments that emphasize oxide films and interfaces to a state-of-the-art microfabrication suite, EMSL has equipment to tailor surfaces, as diverse as single-crystal thin films or nanostructures, or create the microenvironments needed for direct experimentation at micron scales.
Clearance number:
PNNL-S-79031
Contact/Custodian Employee ID:
West, Staci A (staci.west@pnnl.gov)
Date published:
May 2011
Number of pages:
2
Background information:
Category:
EMSL (William R. Wiley Environmental Molecular Sciences Laboratory)
Key words:
Microfabrication, oxide films

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